Composition Oscillations in Hard Material Layers Deposited from the Vapour Phase
نویسنده
چکیده
For the deposition of hard layers on hard metals from the gas phase in the systems Ti-C-B, Ti-N-B, Ti-V-C-0, Ti-Zr-C, Ti-C-N, Ti-C, B-C and Si-C at selected deposition conditions the existence of oscillations was established, which result in a lamellar structure of the layers. As shown by Auger-Spectroscopic analyses the composition of the lamellas changes alternately. Reasons for the lamellar deposition are discussed and a qualitative macroscopic model is presented.
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